November 19, 2009
Entegris ships gas purification systems Used in LED manufacturing
Posted by: admin : Category: Semiconductor Industry
BILLERICA, USA: Entegris Inc. announced it shipped multiple Aeronex Gas Purification Systems to Lextar Electronics Corp. Entegris’ Aeronex systems are used in light emitting diode (LED) manufacturing to help ensure the desired brightness of the final LED device.
Lextar, a leading Taiwan-based manufacturer of super high-brightness LED (HBLED) products, is purchasing separate Aeronex gas purification systems for purifying nitrogen, hydrogen and ammonia used in the gallium nitride-based LED manufacturing process.
The Aeronex systems remove a variety of contaminants including moisture and oxygen down to the parts-per-billion level from the process gases used during the metal organic chemical vapor deposition (MOCVD) process. The removal of these contaminants enhances the photoluminescence of the LED device.
Lextar is one of the world’s top three manufacturers of TFT-LCD panels.
