"MATERIALS: "Nanocrystals bid to extend photolithography"

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“The era of Moores Law is ending”–aren’t you tired of hearing that prediction over and over again, only to be proven a premature death declaration. Well brace yourself, because once again the status quo in microchip-making, photolithography, has been reaffirmed. A new technique that adds nanoparticles atop conventional photo-resist claims to be able to extend the lifetime of existing semiconductor fabrication equipment indefinitely. Look for more dire predictions of the “end of the road” to be proven wrong over and over again. R.C.J.


Optical lithography can be extended below 32 nanometers, according to Pixelligent Technologies LLC, which has developed a nanocrystalline material that it says enhances the resolution of existing photolithography equipment. The company recently closed a $2 million round of equity financing to commercialize its nanocrystals, which it says have applications in optical lithography and as nanocomposite coatings for microelectronics. Pixelligent’s secret sauce involves the fabrication of nonsilicon nanocrystals with properties custom-designed for specific applications. The company declined to identify the exact composition of its proprietary nanoparticles, except to say that they are nonsilicon. By combining the semiconducting nanocrystals with lithographic polymers, Pixelligent claims traditional resists can be improved so that they can image much finer lines. The company also claims its nanocrystal coatings result in higher yields, lower materials costs and improved throughput, all while using existing chip fabrication equipment.
Text: http://www.eetimes.com/showArticle.jhtml?articleID=217700848

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